Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
by Di Chang 1,2,3,*ORCID,Ziqi Yin 2,3,Yunke Sun 2,3,Pengcheng Hu 2,3ORCID,Jiubin Tan 2,3 andZhigang Fan 1
1.Postdoctoral Research Station for Optical Engineering, Research Center for Space Optical Engineering, School of Astronautics, Harbin Institute of Technology, Harbin 150001, China
2.Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
3.Key Lab of Ultra-Precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
Received: 30 September 2022 / Revised: 30 October 2022 / Accepted: 2 November 2022 / Published: 5 November 2022
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
內文搜尋

X